Below you will find pages that utilize the taxonomy term “Uniform” Uniform heat for 300mm wafer IR On a 300mm line, the photoresist bake is where you lock in the thermal budget. A hot or cold edge, a drift during hard bake, and your CD uniformity... Read more...
Uniform heat for 300mm wafer IR On a 300mm line, the photoresist bake is where you lock in the thermal budget. A hot or cold edge, a drift during hard bake, and your CD uniformity... Read more...
